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1．高速计数器概述
21点高速计数器C235～C255共用PLC的8个高速计数器输入端X0～X7，某一输入端同时只能供一个高速计数器使用。这21个计数器均为32位加/减计数器(见表3–7)。不同类型的高速计数器可以同时使用，但是它们的高速计数器输入不能冲突。
高速计数器的运行建立在中断的基础上，这意味着事件的触发与扫描时间无关。在对外部高速脉冲计数时，梯形图中高速计数器的线圈应一直通电，以表示与它有关的输入点已被使用，其他高速计数器的处理不能与它冲突。可用运行时一直为ON的M8000的常开触点来驱动高速计数器的线圈。
例如在图1中，当X14为ON时，选择了高速计数器C235，从表3–7可知，C235的计数输入端是X0，但是它并不在程序中出现，计数信号不是X14提供的。
表1给出了各高速计数器对应的输入端子的元件号，表中的U、D分别为加、减计数输入，A、B分别为A、B相输入，R为复位输入，S为置位输入。
APPLIED MATERIALS 0200-05959, EinzelringQUARTZ, 09 Hhe, 12RECESSDBSH
APPLIED MATERIALS 0021-04258, Plattenhalter Aluminium
RIGAKU 4259B2, R2HVKabel
APPLIED MATERIALS 0021-04258, plate retainer aluminum
MKS 51A31TGA2BA015,Type 51A Mini Vacuum
5046996, 00000011040771, Roller
MID-AMERICA-PLASTICS426142-001
APPLIED MATERIALS 0200-20164, Isolator,Lampenabdeckung rechts
VOEGTLIN GCA-C9SA-FA25 red-y Massendurchflussmesser
APPLIED MATERIALS 0200-20162, Isolator,Lampenhohlraum rechts
MKS 141A-23030, Absolutdrucksensor
APPLIED MATERIALS 0200-20162, insulator
NORMA 114-4-1.2/612071-32/06 , GRIP E W2
3D05-350028-11 Insulator, ESC Encloser
MID-AMERICA-PLASTICS426141-001
APTech AP1010S 3 PWFV4 FV4 IV4, Regler+WIKA Manometer
Applied Materials CORONA-FRE 645-00078-00
MKS 901P-11040-0054 901P Loadlock Pressure
NORMA 128-4-2.5/505745-27/08 , GRIP E W2
Rigaku X-Ray Filament SFP7, D2H65E
NORMA 122-4-1.5/736002-14/08 , GRIP E W2
APPLIED MATERIALS 0020-99305, Halterung
VOEGTLIN GCR-C9SA-BA30
VOEGTLIN GCA-D9SA-FA95
APPLIED MATERIALS 0020-99305, bulkhead bracket
NORMA 118-4-1.5/502896-04/08 , GRIP E W2
APPLIED MATERIALS 0021-15008, Anoden Endpunktdetektor
Edwards C10516294 DN40KF Flexible Rohrleitung / NW40xNW40
APPLIED MATERIALS 0021-15008
ENTEGRIS 100197732,Ventil - HF N/C FT 1''
APTech Ventile / Valves AP4650/ 3550SM2DRU/ 124ISH3PL228
VOEGTLIN GCR-C9SS-FS25
VOEGTLIN GCR-C9SA-FA20
Rigaku Window 3199B012
MST Honeywell 9602-6100, Satellite XT Sensor (PH3) (2E) .05-1 ppm,
MST Honeywell 9602-6300, Satellite Sensor for Silane (SiH4)0-50 ppm
MST Honeywell 9602-5100, Satellite (1%)(H2) 0-1000 % vol.
APTech einstufiger Druckregler AK1210S 4PL 6 6
APTech Membran Handventil mit Anzeige AP3650S M 2PW FV4
APTech Ventil / Valve AP4650S M 2PW FV6FV4 ISH3 PL228
APTech Ventil / Valve AP4650S M 2PW FV6FV6 ISH3 PL228
ENTEGRIS 305322-004,202-124-01, 1/4''
LAM RESEARCH 839-802758-004 , 1001685, VVLDMT
ENTEGRIS PVT4-T4-2FN-1, 1/4'' Galtek Sperrhahn
LAM RESEARCH 839-802758-004 1001685, VVLDMT
ENTEGRIS 201-87, 1/4'' manuelles Membranventil
ENTEGRIS 100212364,1/4'' PFA Schlauch
LAM RESAERCH 715-078410-200
VARIAN E17042140, Ion Implant System
Rigaku RS-P1100 Filterpapier
APTech AZ1210S 2PW FV8 FV8
MID-AMERICA-PLASTICS413029-001
Celerity TransducerSS2, GFD00A4BSM, 30PSIA, 4 to 20mA
LAM RESEARCH 715-022645-003
APPLIED MATERIALS 0021-04258
APPLIED MATERIALS 0200-76041
APPLIED MATERIALS 0021-76908
APPLIED MATERIALS 0200-76041
APPLIED MATERIALS 0021-76908
APTech AP3800S MV8 MV8 00
APTech AP3800S MV8 MV8 MB
BTU INTERNATIonAL 5097614, Photozelle EM/RCV Paar Thruebeam
APPLIED MATERIALS 0021-37297, CAP VIEW LID 300mm
APPLIED MATERIALS 0021-37297, CAP VIEW LID 300mm
307968-001 , pressure valve
Celerity Manometer 01-0139-F, 1 to 4 bar/ -30 to 60 psi
TEL (TOKYO ELECTRON)5002-400078-11 308366431, Rolle
RIGAKU BZ-2RW82-J
APPLIED MATERIALS 3300-03613, FTG Schlauchverbindung 1/2h x1/2MNPT SST
Edwards C10517401, NW50 Spannring / clamping ring ST,
INFICON BP226882-T , Spannpratze DN160-250 ISO-K
ABB 261GS6505025784,261GS FJP821
ABB 261AS6505002205,261AS LKPN21
ABB AF185-30-22
ABB, GJM2550001R0029
ABB E233-12/48
ABB S202/B10
ABB S201P/C6
ABB S203/K10A
ABB S201P/K16A
ABB 5070/T2
ABB S203/C10
ABB S201P/K2A
